產品名稱：Aeronex Purifier (氣體純化器) | 點閱次數：5097 | 加入時間：2007/7/26 上午 12:47:00
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Aeronex Purifier (氣體純化器)
Inert – He, Ne, Ar, Kr, Xe, N2, C3H8, Hydrocarbons & Fluorocarbons
Non-Reactive - O2, N2O, SF6 , NF3 , NO, Air
Hydrogen - H2 and H2 / inert gas blends
Hydride - NH3, SiH4, GeH4, AsH3, PH3, B2H6 and hydride carrier gas blends
Corrosive - Cl2, HCl, SiCl4, SiH2Cl2, BCl3, HF, F2, SiF4, & HBr
Atmospheric -Clean Dry Air, CO2, liquid CO2 and supercritical CO2
Optics – Clean Dry Air, Inerts, O2, O2/Inert Mixtures, Lens Purge GasesThe Entegris gatekeeper purifier 是應用在線上型 point-of-use (POU)的氣體純化.
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