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回首頁 / 產品介紹 /
氣體過濾器、純化器、擴散器Gas Filter, Gas Purifier,Diffuser
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產品名稱：ChamberGard BGN Fast Vent Diffusers
產品名稱：ChamberGard BGN Fast Vent Diffusers | 點閱次數：2268 | 加入時間：2007/7/26 上午 12:38:55
圖片簡介：
ChamberGard BGN Fast Vent Diffusers
Specifically designed for use in high-flow applications such as load locks used for Flat Panel Display (FPD) and 300 mm tools.
Available in a wide range of configurations and easily customizable.
Compatible with most system designs for easy retrofit into existing tools or built to order for new tools.
Mykrolis’s sintered nickel technology Gentle flow characteristics in a clean diffuser/filtration media that increases throughput with rapid venting to atmosphere.
0.003 μm filtration technology in an integrated filter/diffuser Delivers ultra-clean, diffused gas to the process chamber to minimize on-wafer defects.
氣體擴散器, 改善Chamber破真空擾流, 避免Particle揚塵造成污染。
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