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回首頁 / 產品介紹 /
氣體過濾器、純化器、擴散器Gas Filter, Gas Purifier,Diffuser
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產品名稱:ChamberGard Fast Vent Diffusers
產品名稱:ChamberGard Fast Vent Diffusers | 點閱次數:1510 | 加入時間:2007/7/26 上午 12:37:51 圖片簡介: ChamberGard Fast Vent Diffusers Gentle flow characteristics in a clean diffuser/filtration media that increases throughput with rapid venting to atmosphere Delivers ultra-clean, diffused gas to the process chamber to minimize on-wafer defects Compatible with most system designs for easy installation or retrofit into load clock chambers, cooling chambers, transfer chambers, and process chambers 氣體擴散器, 改善Chamber破真空擾流, 避免Particle揚塵造成污染。 | 相關訊息:前往原廠網站連結 | |
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