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氣體過濾器、純化器、擴散器Gas Filter, Gas Purifier,Diffuser
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產品名稱：Extraction TB150® Resist Contamination Monitor
產品名稱：Extraction TB150® Resist Contamination Monitor | 點閱次數：886 | 加入時間：2007/7/26 上午 12:05:23
圖片簡介：
Extraction TB150® Resist Contamination Monitor
The Extraction Systems TMB 150 delivers knowledge — knowledge of the precise process conditions in advanced lithography bays, where resist contamination can account for half the total CD budget at 0.15 micron design rules. With accuracy in the parts-per-trillion range and autocalibration, the TMB 150 provides one reliable number that indicates all SEMI F21-95 total molecular base airborne contaminants. So you know immediately if there’s a problem, even if the contamination is from an unexpected source.
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