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氣體過濾器、純化器、擴散器Gas Filter, Gas Purifier,Diffuser
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產品名稱:Extraction 3000 filter systems
產品名稱:Extraction 3000 filter systems | 點閱次數:949 | 加入時間:2007/7/26 上午 12:01:01 圖片簡介: Extraction 3000 filter systems protect high NA 248nm and 193nm exposure tool optics and resists from a broad range of molecular acids, bases and condensable organics. Providing comprehensive filtration of the air-handling systems in advanced deep UV (DUV) exposure tools, the Extraction 3000 combines proven contamination-control methodsfor resists with next-generation filtration technology to preserve illumination uniformity, intensity and lens life. | 相關訊息:前往原廠網站連結 | |
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