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產品名稱:125mm (5") Wafer Handling Multiple Wafer Shipping Boxes晶舟盒
產品名稱:125mm (5") Wafer Handling Multiple Wafer Shipping Boxes晶舟盒 | 點閱次數:3755 | 加入時間:2007/4/15 下午 10:48:10
圖片簡介:
Individual horizontal cantilever springs limit wafer rotation to reduce particle contamination and also secure the wafers in the cassette to safeguard against breakage.
Ultrapure polypropylene materials provide a clean shipping environment and assure low levels of condensable inorganics.
Horizontal and vertical robotic pickup flanges on the cassette allow convenient handling.
Center notch track alignment and “H” bar ensure accurate equipment interoperability both vertically and horizontally.
Assembly overall size: 161mm x 177mm x 160mm (6.4" x 7.0" x 6.3")
Cassette: D1: 14.53mm (0.57") Pitch: 4.76mm (0.19") Overall size: 144mm x 153mm x 146mm (5.7" x 6.0" x 5.8")

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