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晶舟盒/晶圓盒 FOUP,FOSB,Wafer Cassette,Shipper,Trays
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產品名稱：M20X Series 200 MM Pods 晶舟承載盒
產品名稱：M20X Series 200 MM Pods 晶舟承載盒 | 點閱次數：1811 | 加入時間：2007/4/15 下午 10:41:14
圖片簡介：
Advanced Wafer IsolationTrends in wafer processing technology have mandated advancements in wafer handling technology to support today’s advanced semiconductor processing facilities. Advanced wafer isolation pods provide wafer isolation, and coupled with advanced wafer transport carriers, offer performance benefits over traditional wafer carriers and storage boxes, including: • Reliable wafer isolation – in a controlled minienvironment • Secure wafer protection – from electrostatic discharge, damage and contamination • Precise equipment operation and wafer access – on process tools and AMHS The M20X Series 200mm Pod is a component of Silicon Delivery™ Systems and Services – Entegris’ unique materials integrity management solution to cost effectively manage silicon from production to consumption. This offering brings together wafer and device handling systems and services into a customized, coordinated package that works for you.General Specifications
Accommodate most 25 and 26 capacity 200mm wafer carriers
M200 Series for most standard carriers
M205 Series for wide flange carriers
Compliant with SEMI® standard E19
Top automation flange for OHT systems
Side rails for PGV and AGV transport
Side handles for manual handling
Inert gas purge compatible option
Compatible with multiple ID options
Cleaned and cleanroom packaged
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