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晶舟盒/晶圓盒 FOUP,FOSB,Wafer Cassette,Shipper,Trays
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產品名稱：200mm Process Wafer Carriers 製程晶舟
產品名稱：200mm Process Wafer Carriers 製程晶舟 | 點閱次數：2466 | 加入時間：2007/4/15 下午 10:37:07
圖片簡介：
Entegris Process Enhancement Wafer Carriers 晶舟盒 General Specifications
Open flow carrier allows solutions to pass through evenly and quickly
One-half the volume and mass of traditional process carriers
One-fourth the surface area of traditional process carriers
Modular construction includes reinforcement rods for added rigidity and strength
Lift points on carrier ends for automated handling
V-notch locators on carrier ends and rails forlocation on equipment
Chemical resistant PFA material wetted surfaces
Wafer capacity: 50
Pocket spacing: 6.4mm (0.25")
Traditional Process Wafer CarriersGeneral Specifications
Open side walls allow solutions to pass through evenly and quickly
Low and high profile
"H" bar for equipment interface
Locating track notches at the center of the thirteenth pocket
Pins and holes on the top rail (unless noted)
Chemical resistant PFA material
Wafer capacity: 25, 26 or 50
D1 dimension: 25.4mm (1.00")
Pocket spacing: A192-82M: 3.2mm (0.13") All others: 6.4mm (0.25")
Pocket flat: 1.7mm (0.07") CKplas Cassette─可替代Entegris Cassette/replace Entegris Cassette。可替代ePAK Cassette/replace ePAK Cassette。可替代DAINICHI Cassette/replace DAINICHI Cassette。
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