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回首頁 / 產品介紹 /
晶舟盒/晶圓盒 FOUP,FOSB,Wafer Cassette,Shipper,Trays
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產品名稱：FOUP 晶圓盒
產品名稱：FOUP 晶圓盒 | 點閱次數：3065 | 加入時間：2007/4/15 下午 10:32:48
圖片簡介：
Features
• Industry-proven door for equipment interoperability and long life • Wafer supports integral with shell give excellent wafer plane performance and reliable wafer access • Accurate equipment interfaces – Top robotic flange – Bottom kinematic coupling • Ergonomic side handles for manual handling • Unsurpassed cleanability and dryability • Effective ESD path-to-ground • ESD shell option provides added protection for wafers • Purge capable • High-strength assembly • Wafers retained against shock and vibration • Meets all applicable SEMI standards
Specifications
Overall Size/Weight • Width: 416 mm (16.4") • Depth: 333 mm (13.1") • Height: 335 mm (13.2") • Weight (empty): 4.2 kg (9.26 lb) (with wafers): 7.3 kg (16.09 lb)
Materials of Construction
• Ultrapure polycarbonate used in the FOUP shell, door housing and door panels • STAT-PROR 3000 carbon-filled PEEK™ material used in wafer contact areas in the shell and wafer retainer • STAT-PROR 500 carbon-filled polycarbonate used in the ESD FOUP shell, door housing, door components • Ultrapure thermoplastic elastomer (TPE) material used in the critical door seal Configuration Options and Accessories
Color Options • Color options on shell and door • Five color options available: red, green, orange, clear and black (ESD shell only)
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