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晶舟盒/晶圓盒 FOUP,FOSB,Wafer Cassette,Shipper,Trays
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產品名稱：F300 AutoPod™ Wafer Carrier 晶圓承載盒
產品名稱：F300 AutoPod™ Wafer Carrier 晶圓承載盒 | 點閱次數：2074 | 加入時間：2007/4/15 下午 10:30:28
圖片簡介：
Entegris F300 AutoPod™ Wafer Carrier 晶圓盒 The F300 incorporates a variety of features to provide reliable automation interface and interoperability: • The F300 AutopodR conforms to SEMI standards E47.1 and E1.9. • Precise 10mm wafer spacing with accurate and reliable wafer plane • 142mm square top robotic lifting flange • Lower side conveyor rails • Kinematic coupling plate • Configurable A, B, C or D info pads for product segregation • FIMS interface two-key door
Specifications
• Overall size: Depth: 344mm (13.5") Width: 430mm (16.9") handle to handle Height: 332mm (13.1") • Wafer Spacing: 10mm • Weight without wafers: 4.5 Kg (10 lb) • Weight with wafers: 7.69 Kg (17 lb)
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