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產品名稱:Reticle SMIF Pods SRP-150SD 晶舟承載盒
產品名稱:Reticle SMIF Pods SRP-150SD 晶舟承載盒 | 點閱次數:1293 | 加入時間:2007/4/15 下午 10:24:24
圖片簡介:
SRP-150SD
The SRP-150SD is an advanced reticle handling system providing superior performance during storage and transport.
The SRP-150SD features:
150 mm reticle size
Better than Class 1 internal environment
Automation compatibility
Top structure reduces opportunity for reticle damage due to accidental shock or drop
Multiple ESD paths to ground
Easy to clean and maintain
Secure reticle retention allows transport as well as storage
Reusable
150 mm SMIF interface
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