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產品名稱:Reticle SMIF Pods RSP-150 晶舟承載盒
產品名稱:Reticle SMIF Pods RSP-150 晶舟承載盒 | 點閱次數:1115 | 加入時間:2007/4/15 下午 10:23:09
圖片簡介:
RSP-150
The RSP-150 is an advanced reticle handling system providing high performance during storage and transport.
The RSP-150 features:
150 mm reticle size
Better than Class 1 internal environment
Automation compatible
Metal-free design minimizes contamination
Multiple ESD paths to ground
Cleanable without disassembly
Streamlined design allows much higher storage density
Secure reticle retention allows transport as well as storage
Fully compatible with older generation pods
150 mm SMIF interface

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