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金屬晶舟 Metal Cassette & FOUP Purge Station
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產品名稱：N2 Purging Cabinet - Dessicator-200mm Wafers
產品名稱：N2 Purging Cabinet - Dessicator-200mm Wafers | 點閱次數：1283 | 加入時間：2007/3/30 下午 09:57:05
圖片簡介：
N2 Purging Cabinet - Dessicator-200mm Wafers
Ultraclean N2 purging cabinet for low humidity storage of eight 200mm wafer carriers (SMIF pods). Eliminates gaseous / moisture related degradation and optimizes yields. Full details and operating manual available. Modular design. The cabinet can be purged with N2 or other inert gas. The integral Control system allows manual or automatic purging - affording cost savings. Turnkey product. Fabrication material:304 sst, electro-polished finish.
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