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金屬晶舟 Metal Cassette & FOUP Purge Station
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產品名稱:FOUP Purge Station - Mk 2
產品名稱:FOUP Purge Station - Mk 2 | 點閱次數:1939 | 加入時間:2007/3/30 下午 09:51:59 圖片簡介: FOUP Purge Station - Mk 2 The newly designed 300mm Wafer FOUP Purge Station-Mark 2, is the ideal standalone unit for purging FOUPs with ultraclean Nitrogen.OHV / AGV / PGV CompatibleCompatible with SEMI Specs:E84, E57, E64, E15Placement & Presence sensorsProgrammable Purge ProgramsPurge Flow monitoringCompatible with all purgable FOUPs.The increasing requirement for inert storage of wafers between process steps, makes this Purge Station an invaluable tool that Semiconductor Fabs simply can't afford to be without.
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