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產品名稱:ultrapure water (UPW) purification system 超純水系統
產品名稱:ultrapure water (UPW) purification system 超純水系統 | 點閱次數:1122 | 加入時間:2012/10/1 下午 01:59:49
圖片簡介:
ultrapure water (UPW) purification system 超純水系統
LiquidLens™ ultrapure water (UPW) purification system provides high quality UPW to immersion lithography fabs that require precise control of critical UPW parameters: TOC, Silica and particles level, resistivity, dissolved gases, temperature and pressure.
 
Why "fab" UPW is not good enough for immersion lithography?
Fab UPW quality may vary depending on chemicals that are used for purification. Water quality changes over time depending on seasonal and geographical factors.
Water temperature, pressure and consistency may change as it moves along the facilities.
Entegris UPW purification line includes four products to choose from based on the fab water quality and process requirements
LiquidLens UPW purification system provides high quality ultrapure water to immersion lithography scanner. It ensures fluid lens cleanliness and stability and prevents process interruptions.

UPW 超純水系統

 
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