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產品名稱:ultrapure water (UPW) purification system 超純水系統
產品名稱:ultrapure water (UPW) purification system 超純水系統 | 點閱次數:806 | 加入時間:2012/10/1 下午 01:57:21
圖片簡介:
*ultrapure water (UPW) purification system 超純水系統
*LiquidLens™ ultrapure water (UPW) purification system provides high quality UPW to immersion lithography fabs that require precise control of critical UPW parameters: TOC, Silica and particles level, resistivity, dissolved gases, temperature and pressure.
 
*Why "fab" UPW is not good enough for immersion lithography?
*Fab UPW quality may vary depending on chemicals that are used for purification. *Water quality changes over time depending on seasonal and geographical factors.
Water temperature, pressure and consistency may change as it moves along the facilities.
*Entegris UPW purification line includes four products to choose from based on the fab water quality and process requirements
*LiquidLens UPW purification system provides high quality ultrapure water to immersion lithography scanner. It ensures fluid lens cleanliness and stability and prevents process interruptions.

UPW 超純水系統

 
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